VIBRATIONPROOF FRAME STRUCTURE OF CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To provide the vibrationproof frame structure of a clean room installed in a building for a precision machining and an inspection or the like for a semiconductor plant or the like. SOLUTION: A section supporting a column by a floor frame constituting the clean room is insulated in a structure propagating no vibration while the end section of the floor frame is supported by the structure conducting a bending moment by a plurality of supporting sections in the elastic structure damping vibrations. The section supporting the floor frame by studs is also insulated in the structure propagating no vibration while being supported by the elastic structure damping vibrations. COPYRIGHT: (C)2007,JPO&INPIT