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发明名称
APPARATUS FOR RINSING WAFERS
摘要
申请公布号
KR20070051214(A)
申请公布日期
2007.05.17
申请号
KR20050108777
申请日期
2005.11.14
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KIM, JUNG NAM
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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