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发明名称
APPARATUS FOR SPRAYING PLASMA USING MAGNETIC FIELD
摘要
申请公布号
KR100717374(B1)
申请公布日期
2007.05.04
申请号
KR20060065124
申请日期
2006.07.11
申请人
SEMES CO., LTD.
发明人
NOH, IL HO;JOUNG, YOUNG CHUL
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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