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发明名称
Strained silicon wafer and manufacturing method for the same
摘要
申请公布号
KR100712716(B1)
申请公布日期
2007.05.04
申请号
KR20050007938
申请日期
2005.01.28
申请人
发明人
分类号
H01L21/20;C30B25/18;C30B29/06;C30B29/52
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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