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发明名称
DEVICE FOR MAKING SEMICONDUCTOR
摘要
申请公布号
KR20060084280(A)
申请公布日期
2006.07.24
申请号
KR20050005088
申请日期
2005.01.19
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JEON, YUN KWANG
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
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