Ashing equipment for use of semiconductor fabrication,申请号KR19990000739-传众专利搜索

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发明名称	Ashing equipment for use of semiconductor fabrication
摘要
申请公布号	KR100603925(B1)	申请公布日期	2006.07.24
申请号	KR19990000739	申请日期	1999.01.13
申请人		发明人
分类号	H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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