| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus capable of easily reducing the size. SOLUTION: In a stage apparatus 1, there are included a base 7, a stage 5 provided relatively movable to the base 7, and a plurality of drive units 10, 30 and 50 provided to relatively move the stage 5 to the base. Each of the drive units 10, 30 and 50 includes links 11, 31 and 51 having a first region provided movably in the direction of the stage 5 to the base 7, and a second region provided movably in the direction vertical to the moving direction of the first region; and link drivers 25, 45 and 65 moving the second region of the links in such a manner that the first region of the links 11, 31 and 51 moves the stage 5. COPYRIGHT: (C)2006,JPO&NCIPI |
