| 摘要 |
PROBLEM TO BE SOLVED: To provide an improved dynamic spray system and a method for using the same in a high-speed manufacturing environment. SOLUTION: The improved dynamic spray nozzle system is equipped with a gas/powder exchange chamber 49 connected to a first end of a powder/gas adjusting chamber 80 and a convergent diffusion ultrasonic wave nozzle 54. The ultrasonic wave nozzle has a convergent compartment separated from a diffusion compartment by a throat section 58, and the diffusion compartment is provided with a first section 59A and a second section 59B, and the diffusion compartment is connected to a second end opposed to the first end of the powder/gas adjustment chamber. The method includes the use of the disclosed nozzle system by adding hard particles capable of maximizing a particle temperature while the nozzle is not being plugged, controlling a particle supply speed so as to match a desired very high supply speed and preheating a substrate to wash the substrate and to increase the connectivity of the particles. COPYRIGHT: (C)2006,JPO&NCIPI |
