| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-type substrate processing device and a thin-type substrate transfer apparatus, capable of studying the cause of stopping quickly by making the action of a hand of a robot stop, before colliding against respective processing devices and recording this. SOLUTION: An obstacle detecting sensor 11 is attached to the outside of a thin type substrate mounting area for the hand 8 of the robot 2; and means (27, 28) for stopping the operation of the robot 2, based on the obstacle detecting signal from the obstacle detecting sensor 11 are provided in a controller (20), while a monitoring camera 12 is attached to the outside of the thin type substrate mounting area of the hand 8 and the controller (20) is provided with means (29, 23) for recording the images of the monitoring camera 12. According to this constitution, collision of the hand 8 for the robot 2 can be avoided, and the image upon stopping the robot is extracted to reproduce the same whereby the cause of stopping of the robot can be studied quickly. COPYRIGHT: (C)2006,JPO&NCIPI
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