发明名称 SUBSTRATE CARRIER
摘要 PROBLEM TO BE SOLVED: To achieve a compact arm structure for precisely carrying a board conveying bed that is provided at the tip of a carrying arm to which two sets of parallel links are connected in a stable state. SOLUTION: A turning arm 10 has first and second carrying arms 100, 200 to which two sets of parallel links are connected, and integrates an arm 111 in the first carrying arm 100 to which turning operation is given and an arm 211 in the second carrying arm 200 at a prescribed bending angle, when synchronizing the linear move of the first and second carrying arms 100, 200 and the retraction operation of the other. A prescribed turning operation is given from one drive source of the coaxial drive source to the turning arm 10, and synchronous turning operation in the same direction is given from the other drive source to one of the first and second carrying arms 100, 200. The conveying bed of the carrying arm to which the turning operation is given in the first or second carrying arm is retracted, and the conveying bed of the other carrying arm is moved linearly. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006120659(A) 申请公布日期 2006.05.11
申请号 JP20040303661 申请日期 2004.10.19
申请人 JEL:KK;JEL RESEARCH:KK 发明人 MITSUYOSHI TOSHIHIKO
分类号 H01L21/677;B25J9/06;B65G49/07 主分类号 H01L21/677
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