| 摘要 |
PROBLEM TO BE SOLVED: To enable vapor deposition on a large area without causing partial deterioration of a material, lowering of a yield, and a cost increase, when depositing an organic layer on a substrate to be processed for an organic electroluminescent element. SOLUTION: This device is to deposit the organic layer on the substrate to be processed for the organic electroluminescent element, and is equipped with a vacuum chamber 10, a substrate supporting member to support the substrate to be processed, at least one vapor deposition source 12 provided facingly with the substrate to be processed in the vacuum chamber to dispose an organic material to be vaporized, and a plurality of temperature control means 13 each capable of independently controlling temperatures, which are provided adjacently or in close vicinity to the vapor deposition source, and can independently control each of the temperatures of a plurality of regions on the surface of the vapor deposition source facing the substrate to be processed by the temperature control of each of the temperature control means. This method is to deposit the organic layer on the substrate to be processed for the organic electroluminescent element. COPYRIGHT: (C)2006,JPO&NCIPI
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