| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron gun and an electron beam device equipped with the electron gun with replacement of a diaphragm member efficiently made, and with the center axis of a hole of the diaphragm member enabled to make position adjustment independently against an axis of action of a monochromator. SOLUTION: For the electron gun 51 equipped with an electron source 1, a first electrode 3 having an opening 3b for electron 52a from the first electron source 1 to pass through, a filtering means 5 having an incident opening 5b for the electron 52a passing the opening 3b of the first electrode 3 to enter, and second electrodes 6, 7 for accelerating the electron 52a passing the filtering means 5, the diaphragm 4 having a hole 4a formed more narrowly than the incident opening 5b of the filtering means 5 is arranged at the first electrode 3. COPYRIGHT: (C)2006,JPO&NCIPI
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