发明名称 Method for wafer level stack die placement
摘要 A method for wafer level stack die placement is disclosed. At first, a wafer including a plurality of dice is provided. The wafer is adhered to a photosensitive adhesive tape. The wafer is attached on a die carrier to fix at least one die from the wafer on the die carrier. The die carrier may be another wafer. The photosensitive adhesive tape is selectively exposed to form an adhesion-released portion. The adhesion-released portion is aligned with the fixed die. Then, the photosensitive adhesive tape and the die carrier with the fixed die are apart. Therefore the stack die placement in the die-attaching batch is quick and efficient.
申请公布号 US2006099735(A1) 申请公布日期 2006.05.11
申请号 US20050263974 申请日期 2005.11.02
申请人 CHOU HUI-LUNG 发明人 CHOU HUI-LUNG
分类号 H01L21/50;H01L21/48;H01L21/58;H01L21/68;H01L21/98;H01L23/31;H01L25/065 主分类号 H01L21/50
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