发明名称 |
SYSTEM AND METHOD FOR DETERMINING LINE WIDTHS OF FREE-STANDING STRUCTURES RESULTING FROM A SEMICONDUCTOR MANUFACTURING PROCESS |
摘要 |
A apparatus and method for determining minimum line widths of free standing structures built by a semiconductor (S/C) manufacturing process. Free standing structures are created in a semiconductor device and subjected to an aerosol process which is tuned and centered with respect to a critical line width for the free standing structures. The S/C manufacturing process is tuned responsive to failure of free standing structures of sub-critical line widths.
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申请公布号 |
US2006099832(A1) |
申请公布日期 |
2006.05.11 |
申请号 |
US20040904350 |
申请日期 |
2004.11.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LUCARINI STEPHEN M.;BARTH KARL W.;LOH STEPHEN K. |
分类号 |
H01L21/324 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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