| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage drive device easy in replacing a ball screw without requiring much labor or time. <P>SOLUTION: The stage drive device comprises a ball screw support 10 for supporting ball screws 83, 93. The ball screw support 10 consists of a rolling bearing 11 for rotatably supporting the screw shafts of the ball screws 83, 93, a bearing housing 12 housing the rolling bearing 11, an outer ring thruster 13 for thrusting the outer ring of the rolling bearing 11 against a protruded portion 12a formed on the inner peripheral face of the bearing housing 12, an inner ring thruster 14 for thrusting the inner ring of the rolling bearing 11 against stage portions 83b, 93b formed on the screw shafts of the ball screws 83, 93, and an upper side housing support 16 having a semicircular recessed portion formed in the lower face and fitted to the outer peripheral face of the bearing housing 12. Besides, a lower side housing support 17 is provided which has a semicircular recessed portion formed in the upper face opposed to the lower face of the upper side housing support 16 and fitted to the outer peripheral face of the bearing housing 12. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
