| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-axis actuator which enables resonance driving in a first directional scanning (for example, horizontal scan), and non-resonance linear driving in a second directional scanning (for example, vertical scan). SOLUTION: The two-axis actuator comprises a stage 100 performing a seesaw movement in the first direction, a stage driving unit which is equipped with a first driving comb electrodes 120 extending from the stage part, and a first fixed comb electrodes 220 which extends from a first support part and is alternately disposed with a first driving comb electrodes 120, and a first support part driving unit which is equipped with a second support part supporting the first support part so as to perform the seesaw movement in the second direction, second driving comb electrodes 240 provided on the first support part, and second fixed comb electrodes 350 corresponding to the second driving comb electrodes. The first driving comb electrodes 120, the second fixed comb electrodes 240, and the stage 100 are formed on a first level. The first fixed comb electrodes 220 and the second fixed comb electrodes 350 are formed on a second level that is lower than the first level. COPYRIGHT: (C)2006,JPO&NCIPI
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