发明名称 Semiconductor device and method for fabricating the same
摘要 Gate electrodes 5 A through 5 F are formed to have the same geometry, and protruding parts of the gate electrodes 5 A through 5 F extend across an isolation region onto impurity diffusion regions. The gate electrode 5 B and P-type impurity diffusion regions 7 B 6 are connected through a shared contact 9 A 1 to a first-level interconnect M 1 H, and the gate electrode 5 E and N-type impurity diffusion regions 7 A 6 are connected through a shared contact 9 A 2 to a first-level interconnect M 1 I. In this way, contact pad parts of the gate electrodes 5 A through 5 F can be located apart from active regions of a substrate for MOS transistors. This suppresses the influence of the increased gate length due to hammerhead and gate flaring. As a result, transistors TrA through TrF can have substantially the same finished gate length.
申请公布号 US2006097294(A1) 申请公布日期 2006.05.11
申请号 US20050270602 申请日期 2005.11.10
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 YAMASHITA KYOJI;OTANI KATSUHIRO;ARAI KATSUYA;IKOMA DAISAKU
分类号 H01L29/76;G03F1/36;G03F1/68;H01L21/28;H01L21/768;H01L21/82;H01L21/8238;H01L27/092;H01L27/118;H01L29/417 主分类号 H01L29/76
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