发明名称 REMOVER SOLUTION
摘要 A remover solution composition for resist which comprises a) compound 1, b) compound 2, and c) water. It is capable of removing metal oxides effectively while protecting the metal surface from erosion. Moreover, it is capable of removing organic and inorganic residues.
申请公布号 KR20060041148(A) 申请公布日期 2006.05.11
申请号 KR20057002817 申请日期 2005.02.18
申请人 MERK-KANTO ADVANCED CHEMICAL LTD. 发明人 LI YING HAO;LU CHIH PENG
分类号 C23G1/06;C23G1/00 主分类号 C23G1/06
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