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发明名称
LOADING APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20060040806(A)
申请公布日期
2006.05.11
申请号
KR20040089606
申请日期
2004.11.05
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, SUNG HWA
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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