| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor switching circuit to the wafer state of which a high frequency evaluation test is easily applied, and to provide an evaluation apparatus thereof. SOLUTION: The semiconductor switching circuit is provided with: a common terminal RF_COM; first and second independent terminals RF_1, RF_2; first and second control terminals Vcont1, Vcont2; a first FET T1 whose source and drain are coupled in series between the first independent terminal and the common terminal; a second FET T2 whose source and drain are coupled in series between the second independent terminal and the common terminal; and first and second resistive elements Rgg1, Rgg2 respectively connected between the gates of the first and second FETs and the first and second control terminals, at least one set of the first and second control terminals and the first and second independent terminals is arranged adjacently to each other, and the first and second control terminals are connected via a capacitive element Cx. COPYRIGHT: (C)2006,JPO&NCIPI
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