| 摘要 |
An apparatus and a method for the coating of hollow bodies, in particular for the internal coating of plastic drinks bottles by means of a PICVD is provided. The method ensures a flexible process sequence, a high throughput, an improved supply of fluid and a high-quality coating. The rotary apparatus includes a treatment device with double reactors for receiving in each case at least one workpiece, a fluid supply apparatus and at least one fluid control device, which can be used to control the supply of fluid to the treatment device. It is preferable for the vacuum pumps to be arranged on the rotor such that they rotate therewith.
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