| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a ferroelectric film and its forming method which control the orientation and form a ferroelectric having proper characteristics. <P>SOLUTION: The forming method of a ferroelectric film comprises a step of crystallizing a raw material body 20 of a complex oxide which step comprises a step of performing a first heat treatment to form an initial nucleus, and a step of a second heat treatment for making crystallization growth at a temperature lower than that in the first heat treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
