| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for supporting a large-area substrate, in the manufacture of a flat panel display. SOLUTION: A plurality of support plates 29 are supported by a plurality of support shafts 233, 234 connected to at least one actuator 218. The suceptor 214 is designed to selectively adjust the horizontal sectional profile so as to promote equal and uniform treatment. The horizontal profile may be any one of flat, concave or convex shapes, and adjustment is performed before, during and after the treatment. COPYRIGHT: (C)2006,JPO&NCIPI |
