| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjusting method for a MEMS vibrator by which a frequency can be easily adjusted without damaging a movable electrode and an integrated circuit of the MEMS vibrator. SOLUTION: In a MEMS vibrator 1 formed on a semiconductor substrate 41, a frequency of the MEMS vibrator 1 is preset higher than a desired resonant frequency, an ink 61 is applied to a weight 33 of the movable electrode 30 by an ink jet scheme and hardening treatment is then performed. Thus, the mass of the movable electrode 30 is increased and the resonant frequency of the MEMS vibrator 1 is adjusted to be lower. COPYRIGHT: (C)2006,JPO&NCIPI
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