| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the influence due to disturbance and to restrain unexpected vibration modes from being generated, by connecting an elastomer with one end fixed to a vibration node of a vibration system in an angular velocity detector. <P>SOLUTION: This angular velocity detector 1, provided with the first and second oscillator 101-1, 2 supported under a floating condition allowing displacement with respect to the first substrate 100, by support elastomers 102-1 to 102-6 with the one end connected support parts 103-1 to 103-6 provided on a surface of the first substrate 100, is provided with the elastomers 141-1, 2 with the one end fixed in at least one position, serving as the vibration node of the vibration system comprising the first and second oscillator 101-1, 2 and the support elastomers 102-1 to 102-6, and with the other end supported by elastomer support part 142-1, 2 provided on the first substrate 100. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
