DISTANT-CONTROLLABLE INSPECTION SYSTEM OF SEMICONDUCTOR ELEMENT WITH HANDLER, AND OPERATION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a distant-controllable inspection system of a semiconductor element with a handler, and an operation method thereof. SOLUTION: The distant-controllable inspection system of the semiconductor element with the handler mutually transmits and receives basic communication data for the electrical inspection of the semiconductor element through a GPIB communication cable connecting a tester 110 and the handler 120, communication data for the distant control with the handler, and communication data for checking the state of the handler. This can improve the inspection efficiency of the semiconductor element by distant-controlling various setting matters of the handler through networking. COPYRIGHT: (C)2006,JPO&NCIPI