发明名称 |
Electrostatic chuck including a heater mechanism |
摘要 |
An electrostatic chuck comprises a main body with a mounting surface and an opposed surface facing away from the mounting surface. At least one chucking electrode extends along the mounting surface of the main body and a first heater layer extends along the opposed surface of the main body. The electrostatic chuck can be used to heat and electrostatic ally attract a work piece, such as a wafer, to a work piece support surface during various processing techniques.
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申请公布号 |
US2006098379(A1) |
申请公布日期 |
2006.05.11 |
申请号 |
US20040985718 |
申请日期 |
2004.11.10 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
OTAKA AKINOBU;YAMAZAKI KAZUYOSHI |
分类号 |
H01T23/00;H01L21/00;H01L21/02;H01L21/683;H02N13/00 |
主分类号 |
H01T23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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