发明名称 COMPLEX OXIDES FOR USE IN SEMICONDUCTOR DEVICES AND RELATED METHODS
摘要 A semiconductor device includes a semiconductor substrate, a first oxide layer on the semiconductor substrate including an element from the semiconductor substrate, and a second oxide layer on the first oxide layer opposite the semiconductor substrate. The second oxide layer includes a stoichiometric, single-phase complex oxide represented by the formula: A<SUB>h</SUB>B<SUB>j</SUB>O<SUB>k</SUB>, or equivalently (A<SUB>m</SUB>O<SUB>n</SUB>)<SUB>a</SUB>(B<SUB>q</SUB>O<SUB>r</SUB>)<SUB>b</SUB> in which the elemental oxide components, (A<SUB>m</SUB>O<SUB>n</SUB>) and (B<SUB>q</SUB>O<SUB>r</SUB>) are combined so that h = j or, equivalently, ma = bq, and a, b, h, j, k, m, n, q and r are non-zero integers; and wherein: A is an element of the lanthanide rare earth elements of the periodic table or the trivalent elements from cerium to lutetium; and B is an element of the transition metal elements of groups IIIB, IVB or VB of the periodic table.
申请公布号 WO2005004198(A3) 申请公布日期 2006.05.11
申请号 WO2004US18863 申请日期 2004.06.10
申请人 NORTH CAROLINA STATE UNIVERSITY;THE PENNSYLVANIA STATE RESEARCH FOUNDATION;LUCOVSKY, GERALD;SCHLOM, DARRELL 发明人 LUCOVSKY, GERALD;SCHLOM, DARRELL
分类号 H01L;H01L21/28;H01L29/20;H01L29/51;H01L29/778;H01L31/0216 主分类号 H01L
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