| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspecting illumination device allowing increase of light intensity without increasing the number of light emission bodies. <P>SOLUTION: In this inspecting illumination device, the plurality of light emission bodies 2 for irradiating an inspection object 5 are disposed, a first lens 3 for making light irradiated from each the light emission body 2 parallel light is disposed on an irradiation face side of the light emission body 2, and a second lens 6 for condensing the parallel light from the first lens 3 to concentrate it on a nearly same position of the inspection target 5 is disposed in front of the first lens 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
