| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-priced silicon carbide tool material for firing capable of improving energy saving in firing and productivity and uniformly reaction-treating an article to be fired, and its manufacturing method. <P>SOLUTION: The silicon carbide tool material for firing is composed of a silicon carbide substrate having an apparent porosity of ≥20% and an apparent specific gravity of ≤3.20, and a silicon dioxide layer is formed on the surface of the silicon carbide crystal in the surface layer of the silicon carbide substrate. Its manufacturing method is also provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
