发明名称 SENSOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a sensor device for measuring various physical quantities with high accuracy using a simple constitution, based on a quite new technological idea. <P>SOLUTION: This sensor device is constituted of a pair of electrodes 2, 3 provided separately on a substrate 1; a power source 4 for applying a voltage or a current between the electrodes 2, 3; a bar-shaped conductor group 6 comprising a plurality of bar-shaped conductors 5 erected together between the electrodes 2, 3 on the substrate 1; and a deforming assistant mechanism 7, installed near the bar-shaped conductor group 6 for deforming the bar-shaped conductors 5 and assisting a distance change between the bar-shaped conductors 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006119021(A) 申请公布日期 2006.05.11
申请号 JP20040308065 申请日期 2004.10.22
申请人 FUJITSU LTD 发明人 NAKAMURA SHUNJI;MIMURA TOKUJI;SATO SHINTARO;AWANO YUJI
分类号 G01D5/14;G01D5/16;G01D5/24;G01D5/241;G01F1/28;G01L1/14;G01L1/20;G01L9/02;G01L9/12;G01P5/04;G01P15/12;G01P15/125;G01P15/18 主分类号 G01D5/14
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