| 摘要 |
PROBLEM TO BE SOLVED: To significantly improve cleaning power and a film removing capability by enhancing the activity of a cleaning liquid and a treating liquid. SOLUTION: A cleaning liquid S supplied to a substrate W is irradiated with ultraviolet rays from a UV irradiation part 31. In this case, the cleaning liquid S containing ozone is brought to an excited state, by the ultraviolet rays irradiation, as represented by "O<SB>3</SB>→O(<SP>3</SP>p)+O<SB>2</SB>", whereby oxygen radicals can be provided by low energy. Thus, oxygen radicals can easily be generated, the activity of the cleaning liquid S can be enhanced, and the cleaning power can be significantly improved. COPYRIGHT: (C)2006,JPO&NCIPI
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