| 摘要 |
PROBLEM TO BE SOLVED: To define a range of signal processing suitable for the shape of a mark regardless of the type of the mark. SOLUTION: A mark position detection apparatus for detecting the position of the mark having at least one linear pattern, comprises capturing means 18, 19, and 21 for capturing images of the mark; setting means 22, 24, and 25 for setting a definition frame, which defines the range of signal processing, to the captured images; and a detection means for detecting the position of the mark by performing signal processing on a part set by the definition frame. The setting means can set the definition frame to the linear pattern in such a way as to be separated into two parts on the linear pattern. COPYRIGHT: (C)2006,JPO&NCIPI
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