| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration chip for realizing a stable bending vibration in miniaturization and capable of suppressing a CI value to low, and a piezoelectric device using such a piezoelectric vibration chip. <P>SOLUTION: The piezoelectric vibration chip is provided with a base 51 formed of a piezoelectric material, a plurality of vibrating arms 35, 36 formed integrally with the base and extending parallel to each other, long grooves formed along a longitudinal direction of each of the vibrating arms, and an electrode for driving formed in each of the long grooves 33, 34. Each of the vibrating arms has a first width decreasing portion TL in which the width of the arm suddenly decreased toward its tip at the root of the base portion of the vibrating arm, a second width decreasing portion CL in which the width is gradually decreased further toward the tip from the end of the first width decreasing portion, and a change point P of the width variation in which the width shifts from decrease to increase toward the tip at the end of this second width decreasing portion. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
