发明名称 METHOD FOR MANUFACTURING CRYSTAL OSCILLATOR, AND CRYSTAL OSCILLATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a highly productive crystal oscillator by preventing the occurrence of any crack in a crystal wafer. <P>SOLUTION: This method for manufacturing a crystal oscillator includes a first process for forming a plurality of groove sections for forming a cross-sectional recessed crystal piece which is configured of an oscillation region whose plane is rectangular, and whose thickness is small and an outer-peripheral region arranged in the outer periphery of the oscillation region with thickness which is larger than that of the oscillation region, and a second process for forming a plurality of crystal pieces whose planes are rectangular by dividing the crystal wafer, wherein the four corner sections of the internal walls of the groove sections are made to obliquely cross the two orthogonal sides of the outer peripheral region. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006121441(A) 申请公布日期 2006.05.11
申请号 JP20040307256 申请日期 2004.10.21
申请人 NIPPON DEMPA KOGYO CO LTD 发明人 HATADA NOBUYUKI;ODA SEIJI;KIKUCHI KENICHI
分类号 H03H3/02;H01L41/09;H01L41/18;H01L41/22;H01L41/312;H01L41/332;H03H9/19 主分类号 H03H3/02
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