METAL WIRING, METHOD OF MANUFACTURING THE SAME, ARRAY SUBSTRATE HAVING METAL WIRING, METHOD OF MANUFACTURING THE SAME, AND DISPLAY PANEL HAVING ARRAY SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To improve failure in a metal pattern in a multiple metal wiring structure. SOLUTION: The metal wiring comprises a first metal layer formed on a substrate, an oxide film formed on the first metal layer to suppress corrosion of the first metal layer, and a second metal layer formed on the oxide film. Further, the wiring contains a third metal layer formed under the first metal layer, wherein the third metal layer comprises a metal substance substantially same as the second metal layer. By forming an oxide film between the first metal layer and the second metal layer, corrosion of the first metal layer is prevented. COPYRIGHT: (C)2006,JPO&NCIPI