Column simultaneously focusing a particle beam and an optical beam

摘要

The invention concerns a column for producing a focused particle beam comprising: a device ( 100 ) focusing particles including an output electrode ( 130 ) with an output hole ( 131 ) for allowing through a particle beam (A); an optical focusing device ( 200 ) for simultaneously focusing an optical beam (F) including an output aperture ( 230 ). The invention is characterized in that said output aperture ( 230 ) is transparent to the optical beam (F), while said output electrode ( 130 ) is formed by a metallic insert ( 130 ) maintained in said aperture ( 230 ) and bored with a central hole ( 131 ) forming said output orifice.