| 摘要 |
PROBLEM TO BE SOLVED: To provide a safe and quick TEM sample handling method not requiring high voltage for driving a mechanism, nor damaging a sample at its holding, nor damaging/losing a minute sample by artificial mistakes, nor requiring skilled technique for operation, and to provide a minute sample holder with a simple structure realizing the above handling method. SOLUTION: The normally closed minute sample holder, manufactured by using a semiconductor silicon processing technology, has a tip end part composed of two pieces of needle-shaped bodies 1a, 1b holding a sample. The two pieces of needle-shaped bodies are arranged in a manner of getting close to or keeping a prescribed distance with each other, and electrostatic actuators 2a, 2b, making the two pieces of needle-shaped bodies move apart from each other when a voltage is impressed between them, are arranged. The distance between the two pieces of needle-shaped bodies is widened when the voltage is impressed, and restored by elastic force when the voltage is released. COPYRIGHT: (C)2006,JPO&NCIPI |
