ELECTRON BEAM IRRADIATION EQUIPMENT AND ION GENERATOR

摘要

PROBLEM TO BE SOLVED: To provide an electron beam irradiation equipment which used electron source capable of emitting electron in the atmospheric pressure and capable of setting the distance between the electron source and a body to be processed longer than a case that the atmosphere in the space between the two is air. SOLUTION: The electron source 10 capable of emitting electron in the air pressure and a rectangular case 20 in which the electron source 10 is contained are provided. The body to be processed 30 can be arranged so as to face the electron emission surface of the electron source 10 in the case 20. The space between the electron source 10 and the body to be processed 30 is filled with nitrogen gas which is constituted of molecules with smaller electron affinity than oxygen molecules. COPYRIGHT: (C)2006,JPO&NCIPI