| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and inexpensive pressure sensor by using a piezoelectric film. SOLUTION: In this pressure sensor, a metal package 2 receives a pressure of a detection object to generate strain, the piezoelectric film 3 generates a potential difference in response to a quantity of the strain, the potential difference is taken out by an electrode 4, a pressure detecting part 5 detects the pressure applied onto a measuring object, based on the potential difference, and the compact and inexpensive pressure sensor is realized in this manner. COPYRIGHT: (C)2006,JPO&NCIPI
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