| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorine-containing metal complex useful as a raw material for forming thin membrane by a chemical vapor deposition (CVD), and excellent in volatility and stability. SOLUTION: This method for synthesizing the complex is provided by suspending an anhydrous metal chloride of Ca, Mg, Sr or Ba with an aprotic solvent in synthesizing a fluorine-containingβ-diketone complex of Ca, Mg, Sr or Ba, adding for reacting the fluorine-containingβ-diketone, then reacting under the pressurization with 1-50 Pa inert gas while refluxing in 60-140°C temperature range, removing released alcohol, then removing an upper layer solvent from the solution separated into double layers, then adding the aprotic solvent again, refluxing in 60-140°C temperature range, cooling in (-)20-15°C temperature range for precipitating crystals, filtering the crystals, adding the aprotic solvent again, refluxing in 60-140°C temperature range and cooling in (-)20-15°C temperature range to precipitate the crystals in a lower layer. COPYRIGHT: (C)2006,JPO&NCIPI
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