Antriebvorrichtung mit piezoelektrischem Element, Verfahren zur Herstellung derselben und Tintenstrahlaufzeichnungskopf

摘要

Lower electrodes are disposed independently of each other for respective ink cavities through a silicon oxide film on a silicon substrate. PZT films and upper electrodes are disposed on the respective lower electrodes, and then an interlayer insulating film or a passivation film is disposed on top of the whole layer.