| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a managing method for processing procedures of a manufacturing process for a photomask in which wrong processing is avoided by preventing the confirmation of a product name, the material of a substrate, processing conditions, etc., from being erroneously performed or with an omission when a photomask substrate is collated with its manufacture instruction form in the manufacturing process for the photomask. <P>SOLUTION: Disclosed is the managing method for the processing procedures of process progress in the manufacturing process for the photomask comprises at least steps for: forming an optical identification code on the photomask substrate in a drawing process; registering the optical identification code in a key system; storing corresponding process flow information in a key system database; reading the optical identification code in a washing process, an inspecting process, a final inspecting process, and a shipping process; collating an output of its product name, an output of the process flow information, the process flow information, and the process flow information of a manufacturing indication form attached to the photomask substrate to confirm the coincidence of the product name; and quitting the processing procedure in the case of matching or executing the process processing and inputting its result in the case of mismatching. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
