| 摘要 |
PROBLEM TO BE SOLVED: To accurately identify systematic errors in a flatness measuring system. SOLUTION: In this systematic error measuring method of the flatness measuring system, the systematic errors in the flatness measuring system is determined by using a first shape data acquired by measuring a specimen surface shape in the first state on a prescribed reference position by an area sensor, a second shape data acquired, by measuring by the area sensor the specimen surface shape in the second state determined by being shifted rotationally from the first state by a rotating mechanism, the third shape data acquired by measuring by the area sensor the specimen surface shape in a third state determined by being shifted linearly from the first state in a prescribed direction by a positioning stage, and a fourth shape data acquired by measuring by the area sensor the specimen surface shape in a fourth state, determined by being rotationally shifted from the third state by the rotating mechanism. In the method, when the second data and the third data are determined, a large number of times of measurements accompanied by rotational shift are performed, in order to reduce accidental errors accompanying from the rotational shift. COPYRIGHT: (C)2006,JPO&NCIPI
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