| 摘要 |
An acceleration sensor having an acceleration sensor chip that has a mass portion, a supporting frame, and a flexible arm provided with a piezoelectric resistor element on its upper surface, and also having an upper regulation plate that is bonded to the upper surface of the support frame, that has an IC circuit, and that has a larger area than the support frame. The acceleration sensor chip and the upper regulation plate are encased in a protective case with a cover. The regulation plate projects from the outer wall of the support frame and closes the space in the protective case containing the chip to block air flow between the above and below the regulation plate, and as a result, a temperature rise by the IC circuit is uniform between the piezoelectric resistor elements, provided on the upper surface of the flexible arm, and offset voltage is reduced. |
