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发明名称
摘要
申请公布号
JP2006514783(A)
申请公布日期
2006.05.11
申请号
JP20050501104
申请日期
2003.10.06
申请人
发明人
分类号
H01L21/3065;H01L21/311;H01L21/768
主分类号
H01L21/3065
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