COATING LIQUID FOR FORMING SILICA BASED FILM

摘要

PROBLEM TO BE SOLVED: To provide a coating liquid for forming a silica based film which has a low dielectric constant and can form a silica based film which is hard to reduce film thickness by peeling liquid or to raise a dielectric constant. SOLUTION: The coating liquid for forming the silica based film contains (A) a reaction product made to perform a hydrolysis reaction of the alkyltrialkoxysilane, and (B) one type or more selected from a group consisting of a polyalkyleneglycol and its end alkylate. COPYRIGHT: (C)2006,JPO&NCIPI