| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin composition for forming a pattern which gives an optical waveguide excellent in precision and shape as well as heat resistance and light transmissivity, and also to provide a pattern forming process, which is simple and inexpensive and gives an excellent micro pattern with an excellent pattern precision and a pattern shape. SOLUTION: The resin composition for forming a pattern contains a silicone polymer having a carbon-carbon unsaturated bond and a silicon-hydrogen bond in a molecule. The pattern forming process comprises the steps of creating a coated surface prepared by coating the above composition on a substrate and stamping molding by pressing a stamper-mask prepared with a specific shape on the coated substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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