| 摘要 |
A process and apparatus for applying an optical coating to a substrate, wherein a transition layer 12 , which is used to match mechanical properties of a substrate 10 to mechanical properties of a layer system 16 to be applied upon the transition layer 12 , is deposited on a front surface 20 of the substrate 10 . For this purpose, during a sputtering process carried out in a vacuum chamber 18 , reaction products 14 are incorporated at least virtually exclusively in the transition layer 12 on the substrate. This prevents other surfaces of the vacuum chamber 18 and the rear side 34 of the substrate 10 from being contaminated with the reaction products 14 and/or their precursors.
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