| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain long lifetime for an UV-ray exposure device, by enhancing the efficiency of removing impurities contained in gas being supplied to the UV-ray exposure device and preventing deposition of impurities in the UV-ray irradiated region or on the periphery thereof, thereby preventing deterioration in the image formation performance of the exposure device. <P>SOLUTION: An adsorption material, having a fibrous structure is arranged, such that a space is provided between the fibrous structure and a metal tube that supports the optical system of the exposure device. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
